IONIMPLANTERING UNDER ANVENDELSE AF ALKALI- ELLER JORDALKALIMETALTETRAFLUORBORAT SOM BORIONKILDE,申请号DK19870000244-传众专利搜索

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发明名称	IONIMPLANTERING UNDER ANVENDELSE AF ALKALI- ELLER JORDALKALIMETALTETRAFLUORBORAT SOM BORIONKILDE
摘要
申请公布号	DK24487(A)	申请公布日期	1987.01.16
申请号	DK19870000244	申请日期	1987.01.16
申请人	AIR PRODUCTS AND CHEMICALS	发明人	LAGENDIJK, ANDRE;RIAHI, SHANTIA
分类号	H01J37/317;C30B31/22;H01L21/265;(IPC1-7):H01L21/265;H01L21/425	主分类号	H01J37/317
代理机构		代理人
主权项
地址

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