发明名称 METHOD FOR FABRICATING LIQUID CRYSTAL DISPLAY DEVICE USING METAL GETTERING METHOD
摘要 A metal gettering method and a method for manufacturing an LCD using the same are provided to prevent a crystallized silicon layer from being oxidized, thereby improving the metal gettering effect, by forming a capping layer on the crystallized silicon layer. An amorphous silicon layer is formed on a substrate(110). The amorphous silicon is crystallized by performing a crystallizing process. A capping layer(150) is formed on the crystallized silicon layer(130a). The capping layer is oxidized. The oxidized capping layer is removed to exposure a surface of the crystallized silicon layer. The crystallizing process is performed through metal induced crystallization or metal induced lateral crystallization.
申请公布号 KR20070000909(A) 申请公布日期 2007.01.03
申请号 KR20050056579 申请日期 2005.06.28
申请人 LG.PHILIPS LCD CO., LTD. 发明人 LEE, KI HONG
分类号 G02F1/136 主分类号 G02F1/136
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