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发明名称
摘要
申请公布号
DE3403765(C2)
申请公布日期
1987.01.15
申请号
DE19843403765
申请日期
1984.02.03
申请人
DR. JOHANNES HEIDENHAIN GMBH, 8225 TRAUNREUT, DE
发明人
JUNG, WERNER, 8225 TRAUNREUT, DE
分类号
G03F7/20;(IPC1-7):G03F7/20;G03B27/04
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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