| 摘要 |
A turbomolecular drag pump having magnetic bearings is described in which four radial degrees of freedom of the rotor (2) are stabilised by passive magnetic bearings (3, 4 and 5, 6), and the axial degree of freedom is supported by dry-running mechanical axial bearings (7, 8 and 9, 10). A regulating device is employed to keep the rotor close to the unstable axial equilibrium position. <IMAGE>
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