| 摘要 |
<p>An optical measuring device adapted to irradiate a measuring beam on the surface of an object to be measured which is being moved relative to the measuring beam, and detect the Doppler shift of the reflected rays of the measuring beam so as to measure the surface configuration and the sizes of the object. The incident rays of the measuring beam are condensed on the surface of the object by an objective lens such that the rays reflected from the object follows the same optical path as that of the incident ray, a part of the rays reflected by the surface of the object is branched off and received by a first photodetector means including a quarter-sectioned photodetector so that the deviation of the optical path of the reflected rays from the optical path of the incident rays is detected when the inclination of the surface of the object changes, and the optical path of the incident rays is moved in the direction normal to the optical axis of the objective lens in correspondence with a signal output from the first photodetector means and indicative of the deviation, so as to avoid changing the lengths of the optical paths of the reflected rays and the incident rays.</p> |
