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发明名称
DEPOSITION FILM FORMING DEVICE
摘要
申请公布号
JPS627120(A)
申请公布日期
1987.01.14
申请号
JP19850144834
申请日期
1985.07.03
申请人
CANON INC
发明人
MISUMI TERUO;IIDA SHIGEHIRA;KATO MINORU;TAKEI TETSUYA
分类号
H01L21/205;H01L31/04
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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