REACTION TUBE FOR PRODUCING POLYCRYSTALLINE SILICON,申请号JP19850146405-传众专利搜索

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发明名称	REACTION TUBE FOR PRODUCING POLYCRYSTALLINE SILICON
摘要
申请公布号	JPS627620(A)	申请公布日期	1987.01.14
申请号	JP19850146405	申请日期	1985.07.03
申请人	SHIN ETSU CHEM CO LTD	发明人	MOTOMIYA TATSUHIKO;TSUDA NOBUHIRO
分类号	C01B33/02;C23C16/24	主分类号	C01B33/02
代理机构		代理人
主权项
地址

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