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发明名称
BEAM ANNEALING
摘要
申请公布号
JPS627114(A)
申请公布日期
1987.01.14
申请号
JP19850144568
申请日期
1985.07.03
申请人
AGENCY OF IND SCIENCE & TECHNOL
发明人
KOYAMA KENICHI
分类号
H01L21/20;H01L21/263;H01L21/268
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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