| 摘要 |
PURPOSE:To correct the displacement of an optical axis of a laser beam in a laser oscillator and all transmission lines by mounting a beam angle detector at a machining head, and providing a beam angle correcting mechanism in the lines directly after or near the oscillator. CONSTITUTION:A beam angle detecting function having a partial reflecting mirror 12b, a convex lens 12c and a position detector 12d is mounted on a machining head 12 to monitor the variation in the angle of the optical axis of a laser beam by a beam oscillator 1 and a beam transmission line 2. When the optical axis of the laser beam incident to the head is displaced at an angle DELTAtheta, the position of the laser beam incident while condensing by the detector 12d mounted near the focus of the lens 12c displaces at DELTAtheta.L, where L is a distance between the lens 12c and the detector 12d. The angle control motor 11a of a beam angle correcting mechanism 11 is driven by the output signal corresponding to the displacement DELTAtheta.L, and a transmitting mirror 11 is rotated at angle DELTAtheta/2. Thus, the optical axis of the laser beam is corrected to the pre scribed angle. |
