Vertical Schottky barrier gate field-effect transistor in GaAs/GaAlAs

摘要

High transconductance vertical FETs are produced in III-V epitaxially grown layers doped n, p and n, with the in-between submicron (0.15 mu m) layer serving as the FET channel. The layer on the drain side of the channel may be thicker (3 mu m) than on the source side (1.5 mu m). The structure is V-grooved to expose a nearly vertical surface that is Si implanted or regrown with graded n-type GaAs/GaAlAs before a gate contact is deposited on the vertical structure. An alternative to employ a heterostructure with GaAlAs layers for the source and drain, and GaAs for the channel layer. Graded GaAs/GaAlAs is then selectively regrown in the channel layer.