| 摘要 |
A process is disclosed for manufacturing electrically isolated semiconductor device structures. The process includes the steps of providing a semiconductor substrate and selectively etching one surface of that substrate to form etched regions and unetched regions. In a single epitaxial growth step three separate epitaxial layers are grown overlying both the etched and unetched regions. The epitaxial layers are then shaped back to form a substantially planar surface and to expose portions of the first epitaxial layer. The exposed portion of the first epitaxial layer, in combination with the substrate, is suitable for the fabrication of a back contact power transistor. The second epitaxial layer, which follows the contour of the etched surface, bends upwardly and intersects the planar surface to substantially surround portions of the third epitaxial layer and to electrically isolate those portions of the third epitaxial layer from the substrate and first epitaxial layer. The portions of the third epitaxial layer are thus suitable for the implementation of an integrated control circuit function.
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