ZINC OXIDE FILMS DEPOSITION METHOD

摘要

FIELD: application of thin-film coatings, namely application of transparent low-emission coatings in vacuum by reactive magnetron spraying. ^ SUBSTANCE: method is realized due to magnetron spraying while supplying to target pulse bipolar voltage. Invention provides improved uniformity of parameters of film of oxide of zinc doped with aluminum at temperature of substrate no more than 150°C. ^ EFFECT: enhanced uniformity of film parameters. ^ 1 dwg