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经营范围
发明名称
MICROWAVE PLASMA PROCESSOR
摘要
申请公布号
JPS625600(A)
申请公布日期
1987.01.12
申请号
JP19850143036
申请日期
1985.06.28
申请人
SUMITOMO METAL IND LTD
发明人
KOMACHI KYOICHI;KOBAYASHI SUMIO
分类号
H05H1/46
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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