SUBSTRATE FOR THE APPLICATION OF THIN LAYERS, AND METHOD FOR THE PRODUCTION THEREOF

摘要

The invention relates to a substrate for the application of thin layers. The invention further relates to a thin layer battery stack based on such a substrate. The invention also relates to a method for the manufacture of such a substrate. Moreover, the invention relates to a method for the application of at least one layer to such a substrate. The substrate may comprise multiple vias having a width of between 2 and 10 microns. The substrate may be made of silicon and the vias are produced by making holes in the substrate using an etching technique.