| 摘要 |
PURPOSE:To increase the sensitivity of a sensitive body by successively laminating an amorphous silicon-base blocking layer, an amorphous silicon-base charge transferring layer and a charge generating layer of microcrystalline silicon contg. carbon or the like on a support. CONSTITUTION:A blocking layer 2, a charge transferring layer 3 and a charge generating layer 4 are successively laminated on an electrically conductive support 1. The blocking layer 2 is made of amorphous silicon contg. a group III or V element and C, N or O, and the concn. of the group III or V element is made higher on the support 1 side. The charge transferring layer 3 is made of amorphous silicon contg. C, N or O. The charge generating layer 4 is made of microcrystalline silicon contg. C, N or O. Since microcrystalline silicon and amorphous silicon are used and the group III or V element and C, N or O are properly incorporated into the specified layers, the resulting sensitive body can be provided with superior electrostatic charging performance, sensitivity and wear resistance. |
