| 摘要 |
PURPOSE:To prevent accuracy from deteriorating due to thermal deformation of a table device, by coupling a linear motor, moving member and a table through transmission route parts of heat generated from the linear motor. CONSTITUTION:A device, generating heat from a mover 11 in the second linear motor 10 and emitting a part of the heat to be radiated into the air by a connecting member 12, transmits the rest of the heat to a table through the connecting member 12 as shown by a route 101 in the drawing while to a moving member through a stator 10A as shown by a route 102. During this time, the device, radiating the heat, decreases a transmission quantity of heat to the moving member and the table to a small value. While the device, generating heat by a mover 14A in the first linear motor 14 and radiating a part of the heat into the air from a connecting member 13, transmits the rest of the heat to the moving member through the connecting member 13 and the stator 10A of the second linear motor 10 as shown by a route 103 while to a fixed part through a stator 15 as shown by a route 104 in the drawing. |
