| 摘要 |
PURPOSE:To liberate the adsorbed gas in a short time when a cryopump is regenerated, by heating a cryosurface to a prescribed temperature by a heating means. CONSTITUTION:Electric insulation pipes 16 and 17 are installed midway on a coolant feeding pipe 14 for feeding coolant onto a cryosurface 7 and a coolant discharging pipe 15, and electric wires 18 and 19 for heating the cryosurface 7 through the direct conduction onto the cryosurface 7 are connected, and each electric current which flows in the electric wire 18, 19 is controlled by an electric-current controller 21 according to the signal of a temperature measuring element 22 installed onto the cryosurface 7. Therefore, the cryosurface 7 can be kept at the gas liberating temperature, for example at 30-40 deg.K. |
