| 摘要 |
<p>PURPOSE:To decrease color flickering, uneven colors, etc. and to improve color reproducibility and image quality characteristic by providing a stage for forming a transparent film thickness adjusting layer for the part where a layer to be dyed is removed and a stage for forming a protective film over the entire surface. CONSTITUTION:Photodiodes 2 are formed at a prescribed pitch on the surface of a semiconductor substrate 1 and thereafter an insulating film 3, a passivation film 4 and a light shielding aluminum film 5 are formed thereon; in succession, a smooth layer 6 is formed of a photosensitive acrylic resin on the substrate 1 and a casein resist is coated on the smoothed substrate 1 and is exposed after prebaking. The substrate is immersed into pure water and is then subjected to a rinse treatment with a methanol to form a blanking pattern. Color filter regions 24 of the blanking pattern are formed larger than regions 23 of picture element parts. The substrate 1 is immersed byu a cyan dyeing soln. and a resist is coated on the substrate to form an intermediate layer 8 over the entire color filter region. The yellow dyeing layer 9 of the 2nd layer is formed. An over coat layer 10 is formed to the part where the blanking pattern is blanked and the part corresponding to the blanking part. The good image quality is thus obtd.</p> |
