There is provided a portable substrate carrier enclosure. The carrier enclosure has a carrier support; a displaceable cover; spacers between the support and cover; a gas inlet; and a removable lid. There is also provided an assembly and a process for depositing an air-sensitive material onto a substrate using the portable substrate carrier enclosure.
申请公布号
WO2008019076(A3)
申请公布日期
2008.04.24
申请号
WO2007US17360
申请日期
2007.08.03
申请人
E. I. DU PONT DE NEMOURS AND COMPANY;LANG, CHARLES, D.;PERROTTO, JOSEPH, A.;DALY, THOMAS, P.;TILTON, JAMES, N.
发明人
LANG, CHARLES, D.;PERROTTO, JOSEPH, A.;DALY, THOMAS, P.;TILTON, JAMES, N.
