| 摘要 |
PURPOSE:To improve the spatial uniformity of the discharge power density discharge light emitting portion and to make the device small by inducing DC or AC discharge between one or both of the anode an the cathode and the division-type auxiliary electrode having a projected shape, thereby generating spatially uniform and stable discharge at the main electrode. CONSTITUTION:The tip end 6 of a divisional auxiliary electrode 3 has a projected shape, and the distance between the anode 2 is established, for instance, shorter than the distance between the cathode element 1 and the anode 2. Further, the divisional auxiliary electrode 3 is connected through the limiting resistor 8 for auxiliary discharge to a DC power source 7 in common with the limiting resistor 5 for main discharge, and may be arranged in many number perpendicularly to the gas flowing direction (in the direction of the beam). With this, more spatially uniform and high power density discharge can be obtained, high efficiency is attained and the device can be made small. |
