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发明名称
VAPOR-PHASE REACTION DEVICE
摘要
申请公布号
JPS622525(A)
申请公布日期
1987.01.08
申请号
JP19850140865
申请日期
1985.06.27
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
SUZUKI NAOKI;NOZAKI JUNICHI
分类号
H01L21/205;H01L21/263
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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