DEVICE FOR THE INSPECTION OF WAFERS,申请号EP19850107360-传众专利搜索

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发明名称	DEVICE FOR THE INSPECTION OF WAFERS
摘要
申请公布号	EP0168643(A3)	申请公布日期	1987.01.07
申请号	EP19850107360	申请日期	1985.06.14
申请人	BILLE, JOSEF, PROF. DR.;HUNKLINGER, SIEGFRIED, PROF. DR.	发明人	BILLE, JOSEF, PROF. DR.
分类号	G01R31/26;G01B11/00;G01B11/24;G01N21/93;G01N21/94;G01N21/95;G01N21/956;G02B21/00;G03F7/20;H01L21/66;(IPC1-7):G01N21/88;G02B26/10;G01N21/64	主分类号	G01R31/26
代理机构		代理人
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