Method for measuring low-frequency signal progressions with an electron probe inside integrated circuits

摘要

A method for measuring a low-frequency signal progression at a measuring point of a specimen by use of an electron probe. A load on the circuit is kept as low as possible by employing a pulsed electron probe during a search of the measuring points. The pulsed electron probe may also be employed for actual measurement. By providing a pulse repitition frequency of the electron probe which is independant of the operating frequency of the circuit specimen, a phase shift of the primary electron pulses relative to the low-frequency signal progression is not necessary for real time measurement of the low-frequency signal progression.