| 摘要 |
oscillation elements (1X, 1Y) for detecting angular velocity; a support substrate (2) electrically connected to the oscillation elements (1X, 1Y) and supporting the oscillation elements (1X, 1Y); a relay substrate (4) electrically connected to the support substrate (2) and having an external connection terminal (3); and a buffer member (5) arranged between the support substrate (2) and the relay substrate (4) and attenuating distortion and vibration transmission between the support substrate (2) and the relay substrate (4). Thus, it is possible to stabilize an oscillation feature without being affected bydistortion or vibration.
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