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发明名称
SUBSTRATE AND MANUFACTURE THEREOF
摘要
申请公布号
JPS61296792(A)
申请公布日期
1986.12.27
申请号
JP19850137775
申请日期
1985.06.26
申请人
HITACHI TOBU SEMICONDUCTOR LTD;HITACHI LTD
发明人
AIKAWA SHINICHI;SASAYA TETSUO
分类号
H01L27/01;H05K1/16;H05K3/10
主分类号
H01L27/01
代理机构
代理人
主权项
地址
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