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经营范围
发明名称
REACTIVE ION ETCHING PROCESS
摘要
申请公布号
JPS61295293(A)
申请公布日期
1986.12.26
申请号
JP19860076854
申请日期
1986.04.04
申请人
INTERNATL BUSINESS MACH CORP <IBM>
发明人
JIYAKURIN KEI BIANCHI;ROBAATO ANSONII GUDEYURA;DENISU JIYON RANJI
分类号
C04B41/53;C04B41/91;H01L21/311
主分类号
C04B41/53
代理机构
代理人
主权项
地址
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