| 摘要 |
PURPOSE:To obtain the titled composition having a high sensitivity and an excellent film forming property, and an anti printing and a heat-resisting properties. CONSTITUTION:The titled composition is composed of a photosensitive compd. having a substd. or an unsubstd. benzophenone structure and a o-quinone diazide group in a molecule. The prescribed positive type photosensitive composition has the high sensitivity and the excellent fine working property, and is suitable to be used as the super-fine working resist material in a manufacture of IC and LSI elements, and also as the photosensitive material in a manufacture of a lithographic plate. |
