RAW MATERIAL GAS FEEDING DEVICE

摘要

PURPOSE:To permit operation for a long time by communicating a service tank contg. high pressure gas sealed therein to a row material tank. CONSTITUTION:High pressure gas 22 set at higher pressure than saturated pressure of raw material gas 4 in a raw material tank 1 is sealed in a service tank 21, and raw material liquid 2 in the tank 21 is supplied to the tank 1 through a flow rate control valve 25, and a check valve 26 by opening a feed pipe 23 with an air driving valve 24. The raw material gas 4 vaporized in the tank 1 is fed to a reaction vessel through a pipe line 5, trap 7, and a mass flow meter 6.