| 摘要 |
PURPOSE:To provide an apparatus capable of treating small amounts of various molded resin articles in respective treating chamber in desirable treatment cycle, by connecting an introducing tube to a plasma generator, connecting the tube to plurality of shower tubes furnished with valves and connecting each tubes to plural treatment chambers. CONSTITUTION:A molded article is set in the plasma treatment chamber 5a in the series (a), the valve 10a is opened while closing the valves 18a, 13a, 9a and 11a, the rotary pump 4a is operated, and the valve 10a is closed and the valves 9a and 11a are opened when the treatment chamber 5a reaches desired vacuum degree. The mechanical booster 4c is operated together with the rotary pump 4a to evacuate the chamber to a vacuum necessary for the treatment, the valve 13a of the shower tube 3a is opened, the operation of the plasma oscillator 15 is started, the plasma gas generated from the generator 1 is introduced into the treatment chamber 5a, and the molded article is treated while opening the valves 17, 13a, 9a, 10a and 11a. After the treatment, the system is switched to the series (b) by closing each valve, stopping the generation of plasma, returning the treatment chamber to normal pressure, taking the molded article out of the chamber and operating the series (b) in the same manner.
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