| 摘要 |
PURPOSE:To prevent the generation of a strain due to the thermal stress and to nitride simultaneously many articles by using a chopper to branch a single laser luminous flux and nitriding simultaneously plural articles with each luminous flux in the NH3 atmosphere. CONSTITUTION:A laser luminous flux 102 oscillated from a single oscillator 101 is branched into the luminous fluxs 106a, 106b with a chopper 104. Furthermore this branched luminous flux 106a is branched into the luminous fluxs 111a, 111b in the two directions with a chopper 108. Similarly the luminous flux 106b is branched into the luminous fluxs 115a, 115b in the two directions with a chopper 112. The above-mentioned branched luminous flux 3 reaches a nitriding reactor 1 provided with an introduction pipe 8 of gaseous NH3 just before a material 4 to be treated and a surface 11 to be nitrided is efficiently nitrided.
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