| 摘要 |
PURPOSE:To form an accumulated film which is uniform and homogeneous and has high performance by using an optical system incorporating a multilayered dielectric mirror as a means supplying the high energy beam. CONSTITUTION:A preliminarily mixed gaseous raw material is introduced into the inside of a reaction vessel 1 via a feed pipe 4. The gaseous raw material incorporated in the reaction vessel 1 is irradiated via the mirror groups 111-115 and a light transmission plate 10 with a luminous flux 7 radiated from a high energy beam generating means 8 and the gaseous raw material is excited, decomposed and polymerized by a photochemical reaction and an accumulated film is formed on a base material 3. As the mirror groups 111-115, a spherical surface aluminum mirror, a plane aluminum mirror, two sheets of plane multilayered film aluminum mirrors and a spherical aluminum mirror are provided in order from a side near to the high energy beam generating means 8. When two sheets of plane multilayered film dielectric mirrors are especially provided in a 2-sheet set so that these are made to a chevron type and the incident angle is regulated to 45 deg., the shading can be corrected. |
