| 摘要 |
PURPOSE:To make it possible to perform high-speed detection by using simple hardware, by reducing the silhouette image of a wafer chip, and forming a detected area. CONSTITUTION:The silhouette image of a wafer chip 1, which is picked up by utilizing transmitting lighting 6, is reduced by the preset number of picture elements. The reduced silhouette image is stored in a frame memory (secondary detected area) 14. Then the stored reduced silhouette image in the frame memory 14 is imparted to one end of a gate 15. The image is picked up by using projection lighting 7. The image is transferred as a detected area in detecting a bad mark 2. An operating part 16 performs image processing based on the signal, which has passed the gate 15. Based on the operated value, whether the bad mark 2 is present is judged.
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