发明名称 MANUFACTURE OF SOLUTION FOR LIQUID PHASE EPITAXY
摘要 PURPOSE:To eliminate irregularity of composition among the distributed solutions, by transferring the solution which dissolved and mixed in a cistern to the auxiliary cistern, and distributing it simutaneously to the solution-storing concavities through the penetrating holes of the slider. CONSTITUTION:The solution in the cistern is once flowed down in the auxiliary cistern 24. The solution spreads uniformly in the auxiliary cistern 24, for its horizontal dimension is large and its vertical dimension is small. By keeping this state for some period, the local ununiformity of composition can be eliminated which existed when the solution remaining in the cistern. moreover the solution in this state is simutaneously distributed into the solution-storing concavities 22 through the penetrating holes 29 of the slider 23 by traveling the slider 23. The irregularity at the time of distribution does not exist in each distributed solution, so that the solution of uniform composition is obtained.
申请公布号 JPS61294813(A) 申请公布日期 1986.12.25
申请号 JP19850137231 申请日期 1985.06.24
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 HIRAYAMA NORIYUKI;OSHIMA MASAAKI
分类号 H01L21/208;C30B19/00 主分类号 H01L21/208
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