| 摘要 |
PURPOSE:To provide precision feed regardless of stage attitude, i.e. vertical or horizontal, by using a fluid drive piston-cylinder assembly for coarse feeding and a feed screw device for fine feeding. CONSTITUTION:A piston-cylinder assembly 3 is installed within a stage 1, wherein the cylinder side of the assembly 3 is fexed with respect to the stage 1. The assembly 3 constitutes a coarse feeding means for the stage 1 and moves it relative to the piston rod 5 with a fluid supplied and exhausted through flexible tubes 6a, 6b. A clamping device 4 is installed on the stage 1 in such a way as surrounding a piston rod 5, and the stage 1 can be locked to the piston rod 5. A fork-shaped fine feeding rod 12 is coupled with the piston rod 5 at its tip through a joint with spherical surface 11, wherein the tip of each divergence of said rod 12 is fixed to a housing lock 13 having a fine feeding nut 8. |
