| 摘要 |
<p>PURPOSE:To remove dust generated during trimming completely by oppositely arranging a blow-off nozzle and a suction nozzle between a beam-condensing optical system and a processing table. CONSTITUTION:A resistor 6 for a trimming substrate 5 is irradiated by laser beams 3a passing through a beam-condensing optical system 3 for a laser trimming device, and trimmed. Dust 6a generated at that time is collected by an air current between a pair of a blow-off nozzle 1 and a suction nozzle 2 oppositely faced between the beam-condensing optical system 3 and a processing table 4. That is, air blown off from the blow-off nozzle 1 is sucked into the suction nozzle 2, and the air current 7 surrounded by dotted lines is formed between the blow-off nozzle 1 and the suction nozzle 2. Dust 6a generated during trimming is collected by the air current 7.</p> |
