| 摘要 |
PURPOSE:To measure roughnesses of various specimen surfaces in non-contacting status, by projecting nearly parallel propagating visible beams of light obliquely from different directions onto a specimen. CONSTITUTION:This apparatus is composed of a plurality of light sources 2 projecting nearly parallel visible beams of light L obliquely onto a specimen obliquely from different directions, a camera 3 for photographing this irradiated surface, a shielding frame body 1 which shields outdoor light from the specimen surface and fixes integrally the source 2 and the camera 3, a portable shadow image recording apparatus and arithmetic operating unit of roughness. And, the shielding frame body 1 is brought to cover the specimen surface so that the position P falls on the center of the specimen surface. Thus, the specimen surface becomes dark by shielding of the outdoor light. Next, 4 lamps 2, 2... are turned on consecutively and the shadow images from 4 directions are obtained with angular phase difference of 90 deg. by each photographing of the specimen surface from the directly above position by the camera 3. Consequently, roughness are represented is 3 dimensions as an average value of peak-to-valley height of the peak calculated from each image. As this measurement can be made without contact, it is applicable to a soft substance and the calculating operation can be done easily and rapidly with high level of accuracy.
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