发明名称 QUARTZ FORK
摘要 PURPOSE:To increase strength by circularly forming the end section of a flat section in a quartz fork. CONSTITUTION:The end sections 10 of a flat section 6 in a quartz fork 4 are shaped circularly and are not tapered, and silicon bars 11 are buried along the end sections. Accordingly, the end sections are not damaged by impacts, and are not deformed by heat and weight, thus increasing strength, then durability for a prolonged term can be obtained.
申请公布号 JPS61292932(A) 申请公布日期 1986.12.23
申请号 JP19850134178 申请日期 1985.06.21
申请人 HITACHI HOKKAI SEMICONDUCTOR LTD;HITACHI LTD 发明人 SUZUKI TAKASHI;MURAMATSU TOSHIAKI
分类号 H01L21/673;B65G49/07;B65H5/04;H01L21/67;H01L21/68 主分类号 H01L21/673
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