| 摘要 |
PURPOSE:To execute the selection work of defectives and the relief work on non-defectives continuously by attaching malfunctioning substances onto imperfect defective separate region section on the discovery of the separate region section. CONSTITUTION:When a wafer 14 is set onto an X-Y table 13, an inspector executes visual inspection regarding a wafer pattern 15 by using a microscope 1 while moving the X-Y table 13, and the inspector pushes a pusher section 9 for a dropper 2 when an imperfect defective pellet section 16a is discovered. Consequently, a piston 7 is moved forward to a cylinder 4, and a trace quantity of a resist 12 are dripped onto the imperfect defective pellet section 16a. When the resist 12 is dripped so as to bury the pattern 15 shaped onto an aluminum film 17 for forming an electrode at that time, the pellet section 16a is selected positively on the inspection of electrical characteristics because the aluminum film 17 is left extending over the whole area through the edging of an in-line, and the wafer 14 may be made to flow to the next process as it is even though the pellet section 16a is contained therein.
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