发明名称 CUTTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a cutting device capable of highly accurately detecting a state of a cutting blade.SOLUTION: The cutting device comprises blade detection means (48) which is provided in a blade cover (40) and detects a cutting blade (36). The blade detection means includes: a detection block (48a) for detecting a position of an end of the cutting blade in a radial direction; and a processing liquid removal block (48b) which is neighboring to the detection block at an upstream side in a rotation direction of the cutting blade. In the processing liquid removal block, a groove (58) the end portion of the cutting blade can enter is formed in a circumferential direction of the cutting blade and on a bottom (58b) of the groove, a through-hole (60) is formed that communicates to the outside of the processing liquid removal block. Therefore, a processing liquid which enters the groove with the rotation of the cutting blade is discharged to the outside of the processing liquid removal block via the through-hole.SELECTED DRAWING: Figure 2
申请公布号 JP2016111243(A) 申请公布日期 2016.06.20
申请号 JP20140248600 申请日期 2014.12.09
申请人 DISCO ABRASIVE SYST LTD 发明人 UEHARA TAKESHI
分类号 H01L21/301;B24B27/06;B24B49/12 主分类号 H01L21/301
代理机构 代理人
主权项
地址