| 摘要 |
PURPOSE:To provide a compact light pulse operated type hydraulic pump used for a robot or the like, while improving the responsive property and enabling slight oil amount to be controlled, by driving a bellows pump and a drive valve of the discharge and suction port with a piezoelectric body actuator. CONSTITUTION:Between the upper plate 2b and the lower plate 2a is provided a piezoelectric actuator 5 having a plurality of piezoelectric elements accumulated. This piezoelectric actuator 5 is energized in the pinching direction by a prepressure spring 19 provided between a flange 6 and a base 4. The flange 6 is provided on the upper portion with a bellows oil pressure chamber 7 which is adapted to carry out pumping action by the piezoelectric actuator 5. And drive valves 10, 11 provided on discharge and suction ports 8, 9 connected to the hydraulic chamber 7 are drivably interlocked with each other by an actuator 16 similar to said actuator 5.
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