| 摘要 |
PURPOSE:To prevent the air turbulence inside the clean room due to the illumination equipment so as to improve the clean environment by designing a clean room in which the width of the illumination equipment in the clean room is made equal to or larger than the width of the filter frame. CONSTITUTION:The illumination part 14 has a structure in which a reflector plate 15 is disposed over a fluorescent lamp 13. The width of the reflector plate 15 is made smaller than the width of a part of frame 10a. This arrangement is adopted so that the flow of the regulated air 9 blown out of the filter 10 may not be disturbed by the reflector plate 15. Since the illumination part, more particularly the reflector plate 15, of the fluorescent lamp 13 is suspended in the work room 3 with a structure narrower than the frame 10a of the filter 10, the regulated air 9 passing through the filter 10 will not become turbulent. As a result, as the turbulence near to the illumination part 14 is prevented and dusts are prevented from staying around, the inside of the work room 3 can always be maintained in a clean environment. |
