摘要 |
PURPOSE:To ensure the electric connection of upper and lower electrode substrates to each other and to accurately maintain the desired gap value by adhering the substrates to each other with an electrically conductive adhesive prepd. by mixing resin with plastic particles each coated with a metallic film. CONSTITUTION:Upper and lower electrode substrates 1, 3 having a common electrode 2 and an electrode terminal 4 for power supply, respectively are adhered to each other with an electrically conductive adhesive 7. This adhesive 7 is prepd. by mixing epoxy resin 11 with electrically conductive particles 10 obtd. by coating each of plastic particles 8 with a metallic film 9. The particles 10 are elastic particles slightly larger than the gap between the substrates 1, 3 and having a softening temp. slightly lower than the curing temp. of the resin 11, and the particles 10 are brought into contact with the substrates 1, 3 at elevated temp. and pressure during the adhesion by large area. Accordingly, the upper and lower electrode substrates can be electrically connected with certainty and the desired gap value can be accurately maintained.
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