| 摘要 |
PURPOSE:To obtain an action characteristic with high response performance by displacing the operating edge of a bellows actuator by means of a pulse operating-type hydraulic pump driven by a piezoelectric body actuator so as to drive a linearly running body and to take out displacement in the linearly direction. CONSTITUTION:The bellows hydraulic chamber 7 of a piezoelectric actuator 5 is connected to discharge intake holes 8, 9 by electrically driven valves 10, 11, and performs discharge intake of oil in a pulse shape. When a hydraulic pump P is driven in order to supply oil from the bellows hydraulic chamber 7 to the discharge intake hole 8 and to take in oil from the discharge intake hole 9, the operating edge of a bellows actuator 41 is changed to make a linearly running body 43 move toward the left direction. The amount of displacement in the linearly direction is determined by pulse voltage applied to a piezoelectric actuator, and the amount can be precisely controlled.
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