发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要 PURPOSE:To do precise and easy screening of semiconductor devices, by forming a fuse circuit for probe-inspection identification on a semiconductor pellet, and by marking the good-or-bad result of the probe inspection by employing cut or non-cut of the fuse circuit. CONSTITUTION:On a semiconductor pellet, a fuse circuit for probe-inspection identification is formed. The fuse circuit is comprised of a polysilicon layer 3 on a field insulating layer 2, a first passivation layer 5 having an opening 4, a wiring layer 6, and a second passivation film 9 having an opening 8 for a pad 7. When an electrical defect is found on any portion of the circuit as a result of the probe inspection, excess current flows across the pad 7 and the ground to melt the fuse circuit, thus identifying defective ones. In this way, precise and easy screening of semiconductor pellets can be done.
申请公布号 JPS61290734(A) 申请公布日期 1986.12.20
申请号 JP19850131865 申请日期 1985.06.19
申请人 HITACHI LTD 发明人 OI EIJI
分类号 H01L21/66 主分类号 H01L21/66
代理机构 代理人
主权项
地址