| 摘要 |
PURPOSE:To measure the flatness accurately, by arranging a scan mechanism provided on a measuring base body, a distance detector for material to be measured mounted on the scan mechanism, a measuring bear for placing the material being measured and a displacement detector for detecting displacement between the distance detector and the measuring base. CONSTITUTION:The distance between a distance detector 13 and material 11 to be measured is detected continuously by scanning with the distance detector 13 in a specified length and the flatness of the material 11 being measured is obtained from data detected to measured the flatness of the plate material. This apparatus is equipped with the distance detector 13 for the material 11 being measured mounted on a scan mechanism 15 provided on a measuring base body, a measuring base 10 for placing the material 11 being measured at the measurement and a displacement detector 14 for detecting any displacement between the distance detector 13 and the measuring base 10. When a displacement such as vibration occurs between the distance detector 13 and the measuring base 10 during the measurement, the relative displacement is detected with the displacement detector 14 and the detection output of the displacement detector 14 is subtracted from the detection value of the distance detector 13 to correct the measured value.
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