| 摘要 |
PURPOSE:To enable a plasma generator to generate stable plasma, by positioning the terminal end of a wave guide at a position spaced from the center of a plasma generating section by a half wavelength + or -5% of the microwave applied to the plasma generating section and fixing a short-circuit plate at the terminal end. CONSTITUTION:The plasma generating unit is composed of a microwave oscillator 11, a wave guide 12 for guiding produced microwaves and a plasma generating section 13 provided in the intermediate part of the wave guide. The wave guide 12 includes an isolator 22 having a dummy road 21, a three-stub tuner 26 having three matching screws 23, 24 and 25 and a short-circuit plate 27, which are arranged in that order from the starting end toward the terminal end of the wave guide. The terminal end of the wave guide 12 is set at a position spaced from the center of the plasma generating section 13 by a half wavelength + or -5% and the short-circuit plate 27 is fixed at this position. The plasma generating section 13 consists of a quartz tube 28 in which a reaction gas is circulated, a gas inlet tube 31 connected to one end of the quartz tube and a gas outlet tube 32 connected to the other end thereof.
|
