| 摘要 |
PURPOSE:To enable highly accurate measurement of a solid shape with respect to any pattern, by detecting the presence of an edge effect varying the irradiation angle of an electron beam to correct the edge effect with a sorting of patterns depending on the results. CONSTITUTION:The solid shape of an object to be measured is measured from a secondary electron image of a scan electron microscope (SEM) 1. An electron beam is made to irradate a sample varying the irradiation angle thereof with a mechanism 2 for changing the inclination of a sample base and the electron generated from the sample is picked up with a detector 5 to detect the position and the number of peaks in the waveform of the detection signal with edge detector sections 10 and 11. The number of peaks is compared by an edge effect decision section 12 and when the presence of any edge effect is determined, the edge height and the angle of inclination are calculated with a height computing section 13. A correction is done with an edge effect correcting section 14 on the basis of the height and the angle of inclination and an inclination data 17 providing the relationship between the brightness and the inclination of a surface from the corrected signal is used to determine the profile between edges and thus, the overall shape is obtained by putting it together with the edge height.
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