| 摘要 |
PURPOSE:To prevent the rebounding of a coating material to the coated surface of a substrate generated at the time of spinning, by providing a rebounding preventing cover other than a diffusion preventing cover so as to cover the coating surface of a disc shaped substrate. CONSTITUTION:A rebounding preventing cover 5 used in a spin coating method is mounted so as not to generate a gap between said cover 5 and a diffusion preventing cover 1 and provided so as to cover the coating surface of a disc shaped substrate 3. Further, the rebounding preventing cover 5 is provided with an inflow port of atmospheric air at the central part thereof and the outer diameter thereof is slightly smaller than that of the disc shaped substrate 3 and the gap with the disc shaped substrate 3 is made min. at the outer periph eral part of said cover 5. Therefore, a scattered coating material 2 is impinged to the rebounding preventing cover 5 even if rebounded from the inner wall of the diffusion preventing cover 1 and not adhered to the coating surface. Further, the rebounding through the narrow gap between the substrate 3 and the cover 5 is inhibited by atmospheric air flowed-in from an inflow port and flowed to the outer periphery by centrifugal force.
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