发明名称 TURNING DEVICE
摘要 PURPOSE:To attain a high resolution by holding both ends of a turning shaft with elastic bodies to keep them turnably. CONSTITUTION:A turning guide shaft 10a of a turntable 10 is fitted to a turning guide hole 11a of a turning base 11 with a high precision, and a micrometer head 13 is turned to turn the turntable 10. A bearing attaching block 15 is coupled rigidly to the turntable 10, and a prepressure is applied to an outer wheel by a prepressure plate 19 and is applied to an inner wheel by a coiled spring 20 to control gaps in the thrust direction and the radial direction. A turning shaft 18 is inserted turnably to the block 15, and flat springs 21 are so arranged that they have a spring property in the turning direction of an arrow theta and have rigidity in the radial direction. The turning shaft 18 and connecting plates 23 are connected by the force of friction, and the turning shaft 18 is held elastically by flat springs 21. Thus, stick slip for minute turning and backlash for change of the turning direction are controlled to perform minute turning with a higher precision.
申请公布号 JPS61288209(A) 申请公布日期 1986.12.18
申请号 JP19850130133 申请日期 1985.06.14
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 YAMAGUCHI MIDORI;MATSUMURA RYUKICHI;NOMURA NOBORU;YAMASHITA KAZUHIRO
分类号 H01L21/30;B23Q1/36;B23Q1/54;G03F7/20;G05D3/00;H01L21/027;H01L21/67;H01L21/68 主分类号 H01L21/30
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