| 摘要 |
The present invention relates to a heater assembly capable of maintaining heating values even when being used for a relatively long time, and an ingot growth apparatus using the same, According to the present invention, the heater assembly comprises a cap installed on a maximum heating point of a heater to be detachable, thereby etching the cap installed on the maximum heating point of the heater even if oxides such as carbon dioxide or the like are repeatedly deposited and dried due to long-term use, and easily replacing the etched cap. Thus, the heater assembly can prevent partial etching of the heater even if it is used for a relatively long time and can maintain heating values evenly across the heater, so the ingot growth apparatus can provide ingots with uniform quality even if an ingot growth process is proceeded repeatedly. |
